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fix: CPU triangle tracing bug and boundary interaction (#219)
* feat: add flux engine benchmarks * chore: bump ViennaRay
1 parent 0b53227 commit 88ee779

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Lines changed: 232 additions & 1 deletion

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‎CMakeLists.txt‎

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CPMAddPackage(
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NAME ViennaRay
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VERSION 4.1.1
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VERSION 4.1.2
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GIT_REPOSITORY "https://github.com/ViennaTools/ViennaRay"
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EXCLUDE_FROM_ALL ${VIENNAPS_BUILD_PYTHON}
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OPTIONS "VIENNARAY_USE_GPU ${VIENNAPS_USE_GPU}")

‎tests/fluxEngineBenchmarks/CMakeLists.txt‎

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project(fluxEngineBenchmarks LANGUAGES CXX)
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viennaps_add_executable(plasmaEtchingBenchmark "plasmaEtching.cpp")
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viennaps_add_executable(spDepositionBenchmark "spDeposition.cpp")
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viennaps_add_executable(spEtchingBenchmark "spEtching.cpp")
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viennaps_add_executable(ibeEtchingBenchmark "ibeEtching.cpp")

‎tests/fluxEngineBenchmarks/ibeEtching.cpp‎

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#include <geometries/psMakeTrench.hpp>
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#include <models/psIonBeamEtching.hpp>
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#include <process/psProcess.hpp>
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#include <psUtil.hpp>
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using namespace viennaps;
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int main(int argc, char *argv[]) {
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using NumericType = double;
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constexpr int D = 2;
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Logger::setLogLevel(LogLevel::WARNING);
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auto run = [&](FluxEngineType fluxEngine) {
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auto geometry = Domain<NumericType, D>::New(
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0.09, 10.0, BoundaryType::REFLECTIVE_BOUNDARY);
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MakeTrench<NumericType, D>(geometry, 5.0, 0.0, 0.0, 2.0).apply();
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IBEParameters<NumericType> ibeParams;
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ibeParams.exponent = 100;
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ibeParams.thetaRMin = 89.;
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ibeParams.thetaRMax = 90.;
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// ibeParams.meanEnergy = 100;
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// ibeParams.sigmaEnergy = 10;
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// ibeParams.thresholdEnergy = 10;
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ibeParams.planeWaferRate = 1.0;
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// ibeParams.cos4Yield.isDefined = true;
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// ibeParams.cos4Yield.a1 = 1.075;
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// ibeParams.cos4Yield.a2 = -1.55;
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// ibeParams.cos4Yield.a3 = 0.65;
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auto model = SmartPointer<IonBeamEtching<NumericType, D>>::New(
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ibeParams, std::vector<Material>{Material::Mask});
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AdvectionParameters advectionParams;
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advectionParams.spatialScheme =
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viennals::SpatialSchemeEnum::LAX_FRIEDRICHS_2ND_ORDER;
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Process<NumericType, D> process(geometry, model);
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process.setProcessDuration(10);
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process.setParameters(advectionParams);
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process.setFluxEngineType(fluxEngine);
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process.apply();
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geometry->saveSurfaceMesh("ibeEtching_" + util::toString(fluxEngine));
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};
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run(FluxEngineType::GPU_TRIANGLE);
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run(FluxEngineType::GPU_DISK);
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run(FluxEngineType::CPU_TRIANGLE);
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run(FluxEngineType::CPU_DISK);
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}

‎tests/fluxEngineBenchmarks/plasmaEtching.cpp‎

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#include <geometries/psMakeHole.hpp>
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#include <models/psSF6O2Etching.hpp>
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#include <process/psProcess.hpp>
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#include <psUtil.hpp>
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using namespace viennaps;
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int main(int argc, char *argv[]) {
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using NumericType = double;
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constexpr int D = 2;
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Logger::setLogLevel(LogLevel::WARNING);
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// set parameter units
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units::Length::setUnit("um");
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units::Time::setUnit("min");
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auto run = [&](FluxEngineType fluxEngine) {
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// geometry setup
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auto geometry = Domain<NumericType, D>::New(
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0.03, 1.0,
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BoundaryType::REFLECTIVE_BOUNDARY); // gridDelta, xExtent, boundary
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MakeHole<NumericType, D>(geometry, 0.175,
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0.0, // holeDepth
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0.0, // holeTaperAngle
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1.2, 1.193, HoleShape::QUARTER)
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.apply();
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// use pre-defined model SF6O2 etching model
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auto modelParams = SF6O2Etching<NumericType, D>::defaultParameters();
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modelParams.beta_E[static_cast<int>(Material::Si)] = 1.0;
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modelParams.beta_E[static_cast<int>(Material::Mask)] = 1.0;
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modelParams.beta_P[static_cast<int>(Material::Si)] = 1.0;
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modelParams.beta_P[static_cast<int>(Material::Mask)] = 1.0;
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modelParams.ionFlux = 1.;
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modelParams.etchantFlux = 4.5e3;
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modelParams.passivationFlux = 8e2;
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modelParams.Ions.meanEnergy = 100;
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modelParams.Ions.sigmaEnergy = 10;
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modelParams.Ions.exponent = 1000;
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modelParams.Passivation.A_ie = 2.0;
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modelParams.Substrate.A_ie = 7;
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auto model = SmartPointer<SF6O2Etching<NumericType, D>>::New(modelParams);
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CoverageParameters coverageParams;
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coverageParams.tolerance = 1e-4;
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RayTracingParameters rayTracingParams;
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rayTracingParams.raysPerPoint = 10000;
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Process<NumericType, D> process(geometry, model);
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process.setProcessDuration(1.0);
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process.setParameters(coverageParams);
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process.setFluxEngineType(fluxEngine);
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process.setParameters(rayTracingParams);
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process.apply();
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geometry->saveSurfaceMesh("PlasmaEtching_" + util::toString(fluxEngine));
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};
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run(FluxEngineType::GPU_TRIANGLE);
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run(FluxEngineType::GPU_DISK);
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run(FluxEngineType::CPU_TRIANGLE);
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run(FluxEngineType::CPU_DISK);
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}

‎tests/fluxEngineBenchmarks/spDeposition.cpp‎

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#include <geometries/psMakeTrench.hpp>
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#include <models/psSingleParticleProcess.hpp>
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#include <process/psProcess.hpp>
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#include <psUtil.hpp>
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using namespace viennaps;
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int main(int argc, char *argv[]) {
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using NumericType = double;
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constexpr int D = 2;
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#ifndef NDEBUG
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Logger::setLogLevel(LogLevel::INTERMEDIATE);
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// omp_set_num_threads(1);
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#else
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Logger::setLogLevel(LogLevel::WARNING);
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#endif
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auto run = [&](FluxEngineType fluxEngine) {
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auto geometry = Domain<NumericType, D>::New(
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0.14, 10, BoundaryType::REFLECTIVE_BOUNDARY);
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MakeTrench<NumericType, D>(geometry, 4.0, 20.0, 0.0, 0.0, 0.0, true)
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.apply();
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geometry->duplicateTopLevelSet(Material::SiO2);
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auto model =
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SmartPointer<SingleParticleProcess<NumericType, D>>::New(1.0, 0.01);
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model->setProcessName(util::toString(fluxEngine));
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RayTracingParameters rayTracingParams;
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rayTracingParams.raysPerPoint = 10000;
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Process<NumericType, D> process(geometry, model);
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process.setProcessDuration(5);
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process.setParameters(rayTracingParams);
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process.setFluxEngineType(fluxEngine);
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process.apply();
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// auto flux = process.calculateFlux();
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// viennals::VTKWriter<NumericType>(
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// flux, "flux_" + util::toString(fluxEngine) + ".vtp")
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// .apply();
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geometry->saveSurfaceMesh("spDeposition_" + util::toString(fluxEngine));
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};
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run(FluxEngineType::GPU_TRIANGLE);
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run(FluxEngineType::GPU_DISK);
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run(FluxEngineType::CPU_TRIANGLE);
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run(FluxEngineType::CPU_DISK);
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}

‎tests/fluxEngineBenchmarks/spEtching.cpp‎

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#include <geometries/psMakeTrench.hpp>
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#include <models/psSingleParticleProcess.hpp>
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#include <process/psProcess.hpp>
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#include <psUtil.hpp>
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using namespace viennaps;
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int main(int argc, char *argv[]) {
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using NumericType = double;
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constexpr int D = 2;
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#ifndef NDEBUG
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Logger::setLogLevel(LogLevel::INTERMEDIATE);
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// omp_set_num_threads(1);
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#else
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Logger::setLogLevel(LogLevel::WARNING);
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#endif
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auto run = [&](FluxEngineType fluxEngine) {
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auto geometry = Domain<NumericType, D>::New(
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0.14, 16, BoundaryType::REFLECTIVE_BOUNDARY);
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MakeTrench<NumericType, D>(geometry, 4.0, 0.0, 0.0, 1.0, 0.0, true).apply();
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auto model = SmartPointer<SingleParticleProcess<NumericType, D>>::New(
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-1.0, 0.05, 10.0, Material::Mask);
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model->setProcessName(util::toString(fluxEngine));
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RayTracingParameters rayTracingParams;
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rayTracingParams.raysPerPoint = 10000;
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Process<NumericType, D> process(geometry, model);
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process.setProcessDuration(5);
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process.setParameters(rayTracingParams);
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process.setFluxEngineType(fluxEngine);
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process.apply();
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// auto flux = process.calculateFlux();
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// viennals::VTKWriter<NumericType>(
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// flux, "flux_" + util::toString(fluxEngine) + ".vtp")
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// .apply();
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geometry->saveSurfaceMesh("spEtching_" + util::toString(fluxEngine));
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};
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run(FluxEngineType::GPU_TRIANGLE);
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run(FluxEngineType::GPU_DISK);
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run(FluxEngineType::CPU_TRIANGLE);
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run(FluxEngineType::CPU_DISK);
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}

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