Skip to content

fix: Plasma models fix#221

Merged
tobre1 merged 2 commits into
masterfrom
plasmaModelsFix
Apr 2, 2026
Merged

fix: Plasma models fix#221
tobre1 merged 2 commits into
masterfrom
plasmaModelsFix

Conversation

@kenyastyle

Copy link
Copy Markdown
Member

It seems I need to set a default for the rate factor now that it was introduced, otherwise I get no etching at all.

@kenyastyle
kenyastyle requested a review from tobre1 April 1, 2026 20:39
@tobre1
tobre1 merged commit e35d96a into master Apr 2, 2026
12 checks passed
tobre1 pushed a commit that referenced this pull request Apr 7, 2026
* set a default rateFactor in plasma models

* change default sticking in SF6C4F8 model
tobre1 added a commit that referenced this pull request Apr 7, 2026
* feat: get disk mesh from domain

* fix: Plasma models fix (#221)

* set a default rateFactor in plasma models

* change default sticking in SF6C4F8 model

* refactor: improve MaterialValueMap and update examples (#222)

* feat: add function to insert mask at front of material stack

* feat: directional process rate based

* feat: material value mapping in single particle process rates

* feat: single particle process python bindings updated

* feat: add mapping in IsotropicProcess

* refactor: material mapping, allow custom material registration

* feat: materials on CUDA device code

* fix: plasma etching models

* feat: add material factors in plasma etching model

* test adding custom material to domain

* refactor: use singleton MaterialRegistry

* material registry tests

* refactor: update directional process

* refactor: udpate ion beam etching model

* fix: faraday cage model, update python bindings

* small map refactor

* fix: bug in mask blur GDS

* feat: parallel blur loop

* fix: correct material check function in CSV file process

* refactor: material info

* feat: fix build

* chore: format

* fix: material info requires string for custom values

* feat: MaterialValueMap iterator includes custom values

* feat(MaterialValueMap): get entries by index

* refactor: SelectiveEpitaxy material handling and emulation examples

* refactor: rename header file with MaterialMap

* refactor: CF4O2 model and selective epitaxy

* fix: clean up finFET example

* refactor: MultiParticleProcess uses MaterialValueMap

* fix: check all examples

* format

* refactor: move geometric model logic to strategy

* feat: mask materials in geometric model

* fix: missing header, python stubs

* refactor: use mask materials in emulation examples

---------

Co-authored-by: Roman Kostal <roman.kstl@gmail.com>
Sign up for free to join this conversation on GitHub. Already have an account? Sign in to comment

Labels

None yet

Projects

None yet

Development

Successfully merging this pull request may close these issues.

2 participants