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feat: mask materials in geometric process models#223

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tobre1 merged 8 commits into
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refactor-geometric
Apr 7, 2026
Merged

feat: mask materials in geometric process models#223
tobre1 merged 8 commits into
masterfrom
refactor-geometric

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@tobre1 tobre1 commented Apr 7, 2026

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tobre1 and others added 8 commits April 1, 2026 18:06
* set a default rateFactor in plasma models

* change default sticking in SF6C4F8 model
* feat: add function to insert mask at front of material stack

* feat: directional process rate based

* feat: material value mapping in single particle process rates

* feat: single particle process python bindings updated

* feat: add mapping in IsotropicProcess

* refactor: material mapping, allow custom material registration

* feat: materials on CUDA device code

* fix: plasma etching models

* feat: add material factors in plasma etching model

* test adding custom material to domain

* refactor: use singleton MaterialRegistry

* material registry tests

* refactor: update directional process

* refactor: udpate ion beam etching model

* fix: faraday cage model, update python bindings

* small map refactor

* fix: bug in mask blur GDS

* feat: parallel blur loop

* fix: correct material check function in CSV file process

* refactor: material info

* feat: fix build

* chore: format

* fix: material info requires string for custom values

* feat: MaterialValueMap iterator includes custom values

* feat(MaterialValueMap): get entries by index

* refactor: SelectiveEpitaxy material handling and emulation examples

* refactor: rename header file with MaterialMap

* refactor: CF4O2 model and selective epitaxy

* fix: clean up finFET example

* refactor: MultiParticleProcess uses MaterialValueMap

* fix: check all examples

* format
@tobre1
tobre1 merged commit 937d716 into master Apr 7, 2026
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@tobre1
tobre1 deleted the refactor-geometric branch April 7, 2026 11:28
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2 participants