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feat: add HF cryogenic plasma etching model for SiO2#227

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gugim2o2o-collab wants to merge 9 commits into
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gugim2o2o-collab:claude/vigilant-wright-34cbc3
Open

feat: add HF cryogenic plasma etching model for SiO2#227
gugim2o2o-collab wants to merge 9 commits into
ViennaTools:masterfrom
gugim2o2o-collab:claude/vigilant-wright-34cbc3

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